README.md

metadata

language:
  - en
license: mit
pretty_name: EUV Projection Optics Absorption–Deformation Coherence Baseline Mapping v0.1
dataset_name: euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
tags:
  - clarusc64
  - euv
  - lithography
  - projection-optics
  - thermal
  - deformation
task_categories:
  - tabular-regression
size_categories:
  - 1K<n<10K
configs:
  - config_name: default
    data_files:
      - split: train
        path: data/train.csv
      - split: test
        path: data/test.csv

What this dataset tests

Baseline coherence between:

absorbed EUV power per projection mirror
cooling and thermal environment
resulting thermo-mechanical deformation modes

This is the first layer needed to forecast overlay drift.

Task

Given power and environment inputs, predict:

coherence_score

A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.

Inputs

• m1_absorbed_power_w
• m2_absorbed_power_w
• m3_absorbed_power_w
• m4_absorbed_power_w
• coolant_flow_lpm
• chamber_temp_c
• scan_duty_cycle

Context outputs

• thermal_mode1_nm
• thermal_mode2_nm
• thermal_mode3_nm

Target

• coherence_score

Output format

Return a single float.

Example: 0.84

Evaluation

Absolute error scoring when ground truth exists.
Format validity scored when ground truth is absent.

Version

v0.1