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- ---
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- license: mit
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- ---
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ ---
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+ language:
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+ - en
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+ license: mit
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+ pretty_name: EUV Projection Optics Absorption–Deformation Coherence Baseline Mapping v0.1
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+ dataset_name: euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
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+ tags:
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+ - clarusc64
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+ - euv
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+ - lithography
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+ - projection-optics
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+ - thermal
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+ - deformation
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+ task_categories:
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+ - tabular-regression
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+ size_categories:
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+ - 1K<n<10K
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+ configs:
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+ - config_name: default
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+ data_files:
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+ - split: train
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+ path: data/train.csv
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+ - split: test
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+ path: data/test.csv
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+ ---
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+
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+ ## What this dataset tests
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+
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+ Baseline coherence between:
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+
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+ absorbed EUV power per projection mirror
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+ cooling and thermal environment
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+ resulting thermo-mechanical deformation modes
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+
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+ This is the first layer needed to forecast overlay drift.
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+
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+ ## Task
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+
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+ Given power and environment inputs, predict:
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+
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+ coherence_score
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+
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+ A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.
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+
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+ ## Inputs
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+
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+ - m1_absorbed_power_w
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+ - m2_absorbed_power_w
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+ - m3_absorbed_power_w
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+ - m4_absorbed_power_w
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+ - coolant_flow_lpm
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+ - chamber_temp_c
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+ - scan_duty_cycle
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+
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+ Context outputs
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+
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+ - thermal_mode1_nm
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+ - thermal_mode2_nm
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+ - thermal_mode3_nm
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+
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+ Target
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+
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+ - coherence_score
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+
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+ ## Output format
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+
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+ Return a single float.
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+
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+ Example:
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+ 0.84
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+
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+ ## Evaluation
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+
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+ Absolute error scoring when ground truth exists.
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+ Format validity scored when ground truth is absent.
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+
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+ ## Version
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+
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+ v0.1