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Update README.md
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README.md
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---
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language:
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- en
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license: mit
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pretty_name: EUV Projection Optics Absorption–Deformation Coherence Baseline Mapping v0.1
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dataset_name: euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
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tags:
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- clarusc64
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- euv
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- lithography
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- projection-optics
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- thermal
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- deformation
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task_categories:
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- tabular-regression
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size_categories:
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- 1K<n<10K
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configs:
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- config_name: default
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data_files:
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- split: train
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path: data/train.csv
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- split: test
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path: data/test.csv
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---
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## What this dataset tests
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Baseline coherence between:
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absorbed EUV power per projection mirror
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cooling and thermal environment
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resulting thermo-mechanical deformation modes
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This is the first layer needed to forecast overlay drift.
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## Task
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Given power and environment inputs, predict:
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coherence_score
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A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.
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## Inputs
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- m1_absorbed_power_w
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- m2_absorbed_power_w
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- m3_absorbed_power_w
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- m4_absorbed_power_w
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- coolant_flow_lpm
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- chamber_temp_c
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- scan_duty_cycle
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Context outputs
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- thermal_mode1_nm
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- thermal_mode2_nm
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- thermal_mode3_nm
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Target
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- coherence_score
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## Output format
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Return a single float.
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Example:
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0.84
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## Evaluation
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Absolute error scoring when ground truth exists.
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Format validity scored when ground truth is absent.
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## Version
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v0.1
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