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Datasets:
ClarusC64
/
euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1

Tasks:
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
projection-optics
thermal
deformation
License:
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The dataset generation failed because of a cast error
Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1/data/test.csv (at revision 68832f649a986cd5a04d823e580eaa15b55a1f87), [/tmp/hf-datasets-cache/medium/datasets/79104765864969-config-parquet-and-info-ClarusC64-euv-projection--8ceea659/hub/datasets--ClarusC64--euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1/snapshots/68832f649a986cd5a04d823e580eaa15b55a1f87/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1@68832f649a986cd5a04d823e580eaa15b55a1f87/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              m1_absorbed_power_w: int64
              m2_absorbed_power_w: int64
              m3_absorbed_power_w: int64
              m4_absorbed_power_w: int64
              coolant_flow_lpm: int64
              chamber_temp_c: double
              scan_duty_cycle: double
              thermal_mode1_nm: double
              thermal_mode2_nm: double
              thermal_mode3_nm: double
              coherence_score: double
              notes: string
              constraints: string
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2174
              to
              {'id': Value('string'), 'case_title': Value('string'), 'm1_absorbed_power_w': Value('int64'), 'm2_absorbed_power_w': Value('int64'), 'm3_absorbed_power_w': Value('int64'), 'm4_absorbed_power_w': Value('int64'), 'coolant_flow_lpm': Value('int64'), 'chamber_temp_c': Value('float64'), 'scan_duty_cycle': Value('float64'), 'thermal_mode1_nm': Value('float64'), 'thermal_mode2_nm': Value('float64'), 'thermal_mode3_nm': Value('float64'), 'coherence_score': Value('float64'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1/data/test.csv (at revision 68832f649a986cd5a04d823e580eaa15b55a1f87), [/tmp/hf-datasets-cache/medium/datasets/79104765864969-config-parquet-and-info-ClarusC64-euv-projection--8ceea659/hub/datasets--ClarusC64--euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1/snapshots/68832f649a986cd5a04d823e580eaa15b55a1f87/data/test.csv (origin=hf://datasets/ClarusC64/euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1@68832f649a986cd5a04d823e580eaa15b55a1f87/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

Need help to make the dataset viewer work? Make sure to review how to configure the dataset viewer, and open a discussion for direct support.

id
string
case_title
string
m1_absorbed_power_w
int64
m2_absorbed_power_w
int64
m3_absorbed_power_w
int64
m4_absorbed_power_w
int64
coolant_flow_lpm
int64
chamber_temp_c
float64
scan_duty_cycle
float64
thermal_mode1_nm
float64
thermal_mode2_nm
float64
thermal_mode3_nm
float64
coherence_score
float64
notes
string
EUV-POA-001
Nominal low load
180
165
150
140
42
21
0.35
0.8
0.5
0.3
0.95
Tight coupling
EUV-POA-002
Nominal mid load
220
205
190
175
42
21.2
0.45
1.2
0.8
0.5
0.93
Stable manifold
EUV-POA-003
High load stable cooling
260
245
225
205
44
21.4
0.55
1.8
1.2
0.8
0.91
Cooling holds
EUV-POA-004
High load warmer chamber
265
250
230
210
44
22
0.55
2.1
1.4
0.9
0.88
Temp bias
EUV-POA-005
Coolant slightly low
270
255
235
215
40
22.1
0.6
2.6
1.8
1.2
0.84
Flow reduced
EUV-POA-006
Local heating signature
275
260
240
220
40
22.3
0.62
3
2.2
1.5
0.79
Mode coupling loosens
EUV-POA-007
Duty cycle stress
285
270
250
230
40
22.5
0.7
3.7
2.8
1.9
0.72
Thermal modes grow
EUV-POA-008
Near nonlinear regime
295
280
260
240
38
22.7
0.75
4.6
3.6
2.5
0.64
Nonlinear onset
EUV-POA-009
Clamp sensitivity zone
305
290
270
250
38
22.9
0.78
5.4
4.3
3.1
0.55
Predictability drops
EUV-POA-010
Pre drift baseline edge
315
300
280
260
36
23.1
0.82
6.3
5.1
3.8
0.46
Baseline near failure

What this dataset tests

Baseline coherence between:

absorbed EUV power per projection mirror
cooling and thermal environment
resulting thermo-mechanical deformation modes

This is the first layer needed to forecast overlay drift.

Task

Given power and environment inputs, predict:

coherence_score

A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.

Inputs

  • m1_absorbed_power_w
  • m2_absorbed_power_w
  • m3_absorbed_power_w
  • m4_absorbed_power_w
  • coolant_flow_lpm
  • chamber_temp_c
  • scan_duty_cycle

Context outputs

  • thermal_mode1_nm
  • thermal_mode2_nm
  • thermal_mode3_nm

Target

  • coherence_score

Output format

Return a single float.

Example: 0.84

Evaluation

Absolute error scoring when ground truth exists.
Format validity scored when ground truth is absent.

Version

v0.1
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