metadata
language:
- en
license: mit
pretty_name: EUV Laser Instability Horizon & CD Risk Routing v0.1
dataset_name: euv-laser-instability-horizon-and-cd-risk-routing-v0.1
tags:
- clarusc64
- euv
- semiconductor
- lithography
- predictive-maintenance
- source-stability
task_categories:
- tabular-regression
size_categories:
- 1K<n<10K
configs:
- config_name: default
data_files:
- split: train
path: data/train.csv
- split: test
path: data/test.csv
What this dataset tests
Predict the time horizon to EUV source instability and route corrective action before CD uniformity collapses.
The model must detect when pulse-shape ↔ EUV energy coupling has degraded enough to threaten wafer uniformity.
Task
Given laser and EUV output parameters, output:
- predicted horizon (cycles to instability)
- cd_uniformity_risk_score (0–1)
- intervention_action
Why fabs care
CD uniformity failures cost yield long before a source “fails.” This dataset trains early intervention routing to preserve throughput.
Inputs
pulse_rise_time_ns
pulse_width_ns
peak_power_mw
pre_pulse_energy_mj
timing_jitter_ns
euv_energy_mean_mj
euv_energy_variance
Outputs
event_horizon_cycles
cd_uniformity_risk_score
intervention_action
Output format example
horizon: 1500
risk: 0.72
action: power_derate
Evaluation
Scoring checks:
- valid horizon prediction
- valid risk range
- correct intervention class
Version
v0.1