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README.md
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---
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language:
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- en
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license: mit
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pretty_name: EUV Laser Instability Horizon & CD Risk Routing v0.1
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dataset_name: euv-laser-instability-horizon-and-cd-risk-routing-v0.1
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tags:
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- clarusc64
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- euv
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- semiconductor
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- lithography
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- predictive-maintenance
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- source-stability
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task_categories:
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- tabular-regression
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size_categories:
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- 1K<n<10K
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configs:
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- config_name: default
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data_files:
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- split: train
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path: data/train.csv
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- split: test
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path: data/test.csv
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---
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## What this dataset tests
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Predict the time horizon to EUV source instability and route corrective action before CD uniformity collapses.
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The model must detect when pulse-shape ↔ EUV energy coupling has degraded enough to threaten wafer uniformity.
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## Task
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Given laser and EUV output parameters, output:
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- predicted horizon (cycles to instability)
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- cd_uniformity_risk_score (0–1)
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- intervention_action
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## Why fabs care
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CD uniformity failures cost yield long before a source “fails.”
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This dataset trains early intervention routing to preserve throughput.
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## Inputs
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pulse_rise_time_ns
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pulse_width_ns
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peak_power_mw
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pre_pulse_energy_mj
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timing_jitter_ns
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euv_energy_mean_mj
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euv_energy_variance
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## Outputs
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event_horizon_cycles
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cd_uniformity_risk_score
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intervention_action
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## Output format example
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horizon: 1500
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risk: 0.72
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action: power_derate
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## Evaluation
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Scoring checks:
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- valid horizon prediction
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- valid risk range
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- correct intervention class
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## Version
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v0.1
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