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- ---
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- license: mit
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- ---
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ ---
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+ language:
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+ - en
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+ license: mit
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+ pretty_name: EUV Laser Instability Horizon & CD Risk Routing v0.1
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+ dataset_name: euv-laser-instability-horizon-and-cd-risk-routing-v0.1
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+ tags:
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+ - clarusc64
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+ - euv
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+ - semiconductor
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+ - lithography
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+ - predictive-maintenance
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+ - source-stability
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+ task_categories:
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+ - tabular-regression
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+ size_categories:
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+ - 1K<n<10K
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+ configs:
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+ - config_name: default
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+ data_files:
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+ - split: train
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+ path: data/train.csv
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+ - split: test
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+ path: data/test.csv
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+ ---
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+
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+ ## What this dataset tests
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+
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+ Predict the time horizon to EUV source instability and route corrective action before CD uniformity collapses.
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+
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+ The model must detect when pulse-shape ↔ EUV energy coupling has degraded enough to threaten wafer uniformity.
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+
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+ ## Task
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+
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+ Given laser and EUV output parameters, output:
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+
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+ - predicted horizon (cycles to instability)
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+ - cd_uniformity_risk_score (0–1)
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+ - intervention_action
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+
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+ ## Why fabs care
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+
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+ CD uniformity failures cost yield long before a source “fails.”
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+ This dataset trains early intervention routing to preserve throughput.
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+
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+ ## Inputs
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+
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+ pulse_rise_time_ns
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+ pulse_width_ns
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+ peak_power_mw
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+ pre_pulse_energy_mj
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+ timing_jitter_ns
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+ euv_energy_mean_mj
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+ euv_energy_variance
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+
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+ ## Outputs
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+
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+ event_horizon_cycles
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+ cd_uniformity_risk_score
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+ intervention_action
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+
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+ ## Output format example
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+
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+ horizon: 1500
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+ risk: 0.72
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+ action: power_derate
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+
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+ ## Evaluation
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+
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+ Scoring checks:
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+
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+ - valid horizon prediction
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+ - valid risk range
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+ - correct intervention class
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+
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+ ## Version
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+
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+ v0.1