Datasets:

ClarusC64
/

euv-laser-instability-horizon-and-cd-risk-routing-v0.1

Error code:   DatasetGenerationCastError
Exception:    DatasetGenerationCastError
Message:      An error occurred while generating the dataset

All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})

This happened while the csv dataset builder was generating data using

hf://datasets/ClarusC64/euv-laser-instability-horizon-and-cd-risk-routing-v0.1/data/test.csv (at revision 21935ee2cb4cc237d773cd87334ae9405bfc0fa7), [/tmp/hf-datasets-cache/medium/datasets/42214992519789-config-parquet-and-info-ClarusC64-euv-laser-insta-90ba7ef2/hub/datasets--ClarusC64--euv-laser-instability-horizon-and-cd-risk-routing-v0.1/snapshots/21935ee2cb4cc237d773cd87334ae9405bfc0fa7/data/test.csv (origin=hf://datasets/ClarusC64/euv-laser-instability-horizon-and-cd-risk-routing-v0.1@21935ee2cb4cc237d773cd87334ae9405bfc0fa7/data/test.csv)]

Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)
Traceback:    Traceback (most recent call last):
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1887, in _prepare_split_single
                  writer.write_table(table)
                File "/usr/local/lib/python3.12/site-packages/datasets/arrow_writer.py", line 675, in write_table
                  pa_table = table_cast(pa_table, self._schema)
                             ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2272, in table_cast
                  return cast_table_to_schema(table, schema)
                         ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/table.py", line 2218, in cast_table_to_schema
                  raise CastError(
              datasets.table.CastError: Couldn't cast
              id: string
              case_title: string
              pulse_rise_time_ns: int64
              pulse_width_ns: int64
              peak_power_mw: double
              pre_pulse_energy_mj: double
              timing_jitter_ns: double
              euv_energy_mean_mj: double
              euv_energy_variance: double
              instability_pattern: double
              event_horizon_cycles: double
              cd_uniformity_risk_score: double
              intervention_action: double
              minimal_fix_set: string
              notes: string
              constraints: double
              -- schema metadata --
              pandas: '{"index_columns": [{"kind": "range", "name": null, "start": 0, "' + 2347
              to
              {'id': Value('string'), 'case_title': Value('string'), 'pulse_rise_time_ns': Value('int64'), 'pulse_width_ns': Value('int64'), 'peak_power_mw': Value('float64'), 'pre_pulse_energy_mj': Value('float64'), 'timing_jitter_ns': Value('float64'), 'euv_energy_mean_mj': Value('float64'), 'euv_energy_variance': Value('float64'), 'instability_pattern': Value('string'), 'event_horizon_cycles': Value('int64'), 'cd_uniformity_risk_score': Value('float64'), 'intervention_action': Value('string'), 'minimal_fix_set': Value('string'), 'notes': Value('string')}
              because column names don't match
              
              During handling of the above exception, another exception occurred:
              
              Traceback (most recent call last):
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 1347, in compute_config_parquet_and_info_response
                  parquet_operations = convert_to_parquet(builder)
                                       ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/src/services/worker/src/worker/job_runners/config/parquet_and_info.py", line 980, in convert_to_parquet
                  builder.download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 884, in download_and_prepare
                  self._download_and_prepare(
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 947, in _download_and_prepare
                  self._prepare_split(split_generator, **prepare_split_kwargs)
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1736, in _prepare_split
                  for job_id, done, content in self._prepare_split_single(
                                               ^^^^^^^^^^^^^^^^^^^^^^^^^^^
                File "/usr/local/lib/python3.12/site-packages/datasets/builder.py", line 1889, in _prepare_split_single
                  raise DatasetGenerationCastError.from_cast_error(
              datasets.exceptions.DatasetGenerationCastError: An error occurred while generating the dataset
              
              All the data files must have the same columns, but at some point there are 1 new columns ({'constraints'})
              
              This happened while the csv dataset builder was generating data using
              
              hf://datasets/ClarusC64/euv-laser-instability-horizon-and-cd-risk-routing-v0.1/data/test.csv (at revision 21935ee2cb4cc237d773cd87334ae9405bfc0fa7), [/tmp/hf-datasets-cache/medium/datasets/42214992519789-config-parquet-and-info-ClarusC64-euv-laser-insta-90ba7ef2/hub/datasets--ClarusC64--euv-laser-instability-horizon-and-cd-risk-routing-v0.1/snapshots/21935ee2cb4cc237d773cd87334ae9405bfc0fa7/data/test.csv (origin=hf://datasets/ClarusC64/euv-laser-instability-horizon-and-cd-risk-routing-v0.1@21935ee2cb4cc237d773cd87334ae9405bfc0fa7/data/test.csv)]
              
              Please either edit the data files to have matching columns, or separate them into different configurations (see docs at https://hf.co/docs/hub/datasets-manual-configuration#multiple-configurations)

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id string	case_title string	pulse_rise_time_ns int64	pulse_width_ns int64	peak_power_mw float64	pre_pulse_energy_mj float64	timing_jitter_ns float64	euv_energy_mean_mj float64	euv_energy_variance float64	instability_pattern string	event_horizon_cycles int64	cd_uniformity_risk_score float64	intervention_action string	minimal_fix_set string	notes string
EUV-LIR-001	Nominal stable	18	220	28	0.45	0.8	3.2	0.03	none	12,000	0.08	none	monitor	Healthy coupling
EUV-LIR-002	Minor jitter growth	18	222	27.9	0.45	1.1	3.18	0.05	jitter_rise	8,000	0.18	retune_timing	timing sync	Watch jitter
EUV-LIR-003	Width drift onset	19	230	27.6	0.44	1.3	3.1	0.08	width_drift	6,000	0.26	pulse_shape_adjust	width calibration	Energy spread rising
EUV-LIR-004	Pre-pulse weakening	19	225	27.4	0.39	1.4	3.02	0.11	pre_pulse_drop	4,200	0.35	pre_pulse_boost	pre-pulse restore	Ignition weaker
EUV-LIR-005	Variance surge	20	236	27.1	0.38	1.7	2.92	0.15	variance_surge	3,000	0.48	stability_tune	pulse control loop	Variance growing
EUV-LIR-006	Bimodal energy onset	21	240	26.9	0.37	1.9	2.8	0.22	bimodal_energy	2,200	0.6	source_recalibration	shape+timing	Two-state output
EUV-LIR-007	Energy dropout events	22	244	26.5	0.35	2.2	2.6	0.28	dropout	1,500	0.72	power_derate	derate+sync	Dropouts appear
EUV-LIR-008	Severe jitter amplification	23	248	26.2	0.34	2.6	2.45	0.34	severe_jitter	900	0.82	full_timing_reset	timing+shape	Instability rising
EUV-LIR-009	Pre-collapse state	24	252	25.9	0.32	3	2.2	0.41	pre_collapse	420	0.92	shutdown_prepare	halt+inspect	CD at risk
EUV-LIR-010	Imminent instability collapse	25	255	25.5	0.3	3.4	2.05	0.48	collapse	120	0.98	halt_source	full stop	Collapse imminent

What this dataset tests

Predict the time horizon to EUV source instability and route corrective action before CD uniformity collapses.

The model must detect when pulse-shape ↔ EUV energy coupling has degraded enough to threaten wafer uniformity.

Task

Given laser and EUV output parameters, output:

predicted horizon (cycles to instability)
cd_uniformity_risk_score (0–1)
intervention_action

Why fabs care

CD uniformity failures cost yield long before a source “fails.” This dataset trains early intervention routing to preserve throughput.

Inputs

pulse_rise_time_ns
pulse_width_ns
peak_power_mw
pre_pulse_energy_mj
timing_jitter_ns
euv_energy_mean_mj
euv_energy_variance

Outputs

event_horizon_cycles
cd_uniformity_risk_score
intervention_action

Output format example

horizon: 1500
risk: 0.72
action: power_derate

Evaluation

Scoring checks:

valid horizon prediction
valid risk range
correct intervention class

Version

v0.1

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Total file size:

8.4 kB