| --- |
| language: |
| - en |
| license: mit |
| pretty_name: EUV Projection Optics Deformation–Overlay Coherence Drift Detection v0.1 |
| dataset_name: euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1 |
| tags: |
| - clarusc64 |
| - euv |
| - lithography |
| - projection-optics |
| - overlay |
| - drift-detection |
| task_categories: |
| - tabular-classification |
| - tabular-regression |
| size_categories: |
| - 1K<n<10K |
| configs: |
| - config_name: default |
| data_files: |
| - split: train |
| path: data/train.csv |
| - split: test |
| path: data/test.csv |
| --- |
| |
| ## What this dataset tests |
|
|
| When thermo-mechanical deformation stops predicting overlay error cleanly. |
|
|
| This is the second layer of projection optics thermo-mechanical decoupling: |
|
|
| deformation modes |
| overlay error growth |
| cause-axis attribution |
|
|
| ## Task |
|
|
| Given deformation modes and overlay state, predict: |
|
|
| overlay_drift_score (0..1) |
| drift_flag (0/1) |
| dominant_cause_axis |
| |
| Output format: |
| float,int,string |
| |
| Example: |
| 0.58,1,cooling |
| |
| ## Fields |
| |
| Inputs |
| - thermal_mode1_nm |
| - thermal_mode2_nm |
| - thermal_mode3_nm |
| - overlay_error_nm |
| - overlay_within_spec |
| - baseline_coherence |
|
|
| Targets |
| - overlay_drift_score |
| - drift_flag |
| - dominant_cause_axis |
| |
| ## Cause axis meanings |
| |
| thermal: global heating trend |
| cooling: flow imbalance or coolant loss |
| mount: clamp or support drift |
| metrology: measurement/model mismatch |
| contamination: absorbed power rise from fouling |
| none: stable regime |
| |
| ## Evaluation |
| |
| Absolute error for drift score |
| Bonus for correct drift flag |
| Bonus for correct cause axis |
| |
| ## Version |
| |
| v0.1 |
| |
