Update README.md

README.md

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----
-license: mit
----
+---
+language:
+  - en
+license: mit
+pretty_name: EUV Projection Optics Deformation–Overlay Coherence Drift Detection v0.1
+dataset_name: euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
+tags:
+  - clarusc64
+  - euv
+  - lithography
+  - projection-optics
+  - overlay
+  - drift-detection
+task_categories:
+  - tabular-classification
+  - tabular-regression
+size_categories:
+  - 1K<n<10K
+configs:
+  - config_name: default
+    data_files:
+      - split: train
+        path: data/train.csv
+      - split: test
+        path: data/test.csv
+---
+
+## What this dataset tests
+
+When thermo-mechanical deformation stops predicting overlay error cleanly.
+
+This is the second layer of projection optics thermo-mechanical decoupling:
+
+deformation modes  
+overlay error growth  
+cause-axis attribution
+
+## Task
+
+Given deformation modes and overlay state, predict:
+
+overlay_drift_score (0..1)  
+drift_flag (0/1)  
+dominant_cause_axis
+
+Output format:
+float,int,string
+
+Example:
+0.58,1,cooling
+
+## Fields
+
+Inputs
+- thermal_mode1_nm
+- thermal_mode2_nm
+- thermal_mode3_nm
+- overlay_error_nm
+- overlay_within_spec
+- baseline_coherence
+
+Targets
+- overlay_drift_score
+- drift_flag
+- dominant_cause_axis
+
+## Cause axis meanings
+
+thermal: global heating trend  
+cooling: flow imbalance or coolant loss  
+mount: clamp or support drift  
+metrology: measurement/model mismatch  
+contamination: absorbed power rise from fouling  
+none: stable regime
+
+## Evaluation
+
+Absolute error for drift score  
+Bonus for correct drift flag  
+Bonus for correct cause axis
+
+## Version
+
+v0.1