metadata
language:
- en
license: mit
pretty_name: EUV Projection Optics Deformation–Overlay Coherence Drift Detection v0.1
dataset_name: euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
tags:
- clarusc64
- euv
- lithography
- projection-optics
- overlay
- drift-detection
task_categories:
- tabular-classification
- tabular-regression
size_categories:
- 1K<n<10K
configs:
- config_name: default
data_files:
- split: train
path: data/train.csv
- split: test
path: data/test.csv
What this dataset tests
When thermo-mechanical deformation stops predicting overlay error cleanly.
This is the second layer of projection optics thermo-mechanical decoupling:
deformation modes
overlay error growth
cause-axis attribution
Task
Given deformation modes and overlay state, predict:
overlay_drift_score (0..1)
drift_flag (0/1)
dominant_cause_axis
Output format: float,int,string
Example: 0.58,1,cooling
Fields
Inputs
- thermal_mode1_nm
- thermal_mode2_nm
- thermal_mode3_nm
- overlay_error_nm
- overlay_within_spec
- baseline_coherence
Targets
- overlay_drift_score
- drift_flag
- dominant_cause_axis
Cause axis meanings
thermal: global heating trend
cooling: flow imbalance or coolant loss
mount: clamp or support drift
metrology: measurement/model mismatch
contamination: absorbed power rise from fouling
none: stable regime
Evaluation
Absolute error for drift score
Bonus for correct drift flag
Bonus for correct cause axis
Version
v0.1