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Datasets:
ClarusC64
/
euv-illumination-pupil-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
optics
drift-detection
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-illumination-pupil-coherence-drift-detection-v0.1
/
data
1.36 kB
1 contributor
History:
2 commits
ClarusC64
Create data/test.csv
fc60cc2
verified
6 months ago
test.csv
Safe
305 Bytes
Create data/test.csv
6 months ago
train.csv
Safe
1.05 kB
Create data/train.csv
6 months ago
