| id,case_title,pupil_centroid_shift_um,pupil_ellipticity,pupil_asymmetry_index,dose_profile_skew,cd_uniformity_nm,sidewall_angle_deg,baseline_coherence,drift_score,drift_flag,notes,constraints | |
| EUV-IPD-T01,Assess drift,3.0,0.14,0.21,0.12,3.8,85.3,0.71,,,"Predict drift_score and drift_flag",Under 250 words | |