Create data/train.csv
Browse files- data/train.csv +11 -0
data/train.csv
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id,case_title,pupil_centroid_shift_um,pupil_ellipticity,pupil_asymmetry_index,dose_profile_skew,cd_uniformity_nm,sidewall_angle_deg,baseline_coherence,drift_score,drift_flag,notes
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EUV-IPD-001,Nominal stable,0.9,0.05,0.07,0.03,1.7,88.4,0.95,0.04,0,"Healthy regime"
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EUV-IPD-002,Minor centroid drift,1.4,0.06,0.09,0.05,2.0,87.9,0.92,0.08,0,"Within tolerance"
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EUV-IPD-003,Ellipticity rising,1.9,0.09,0.12,0.06,2.4,87.2,0.88,0.14,0,"Monitor"
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EUV-IPD-004,Asymmetry shift,2.3,0.11,0.16,0.08,2.9,86.6,0.83,0.22,1,"Drift onset"
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EUV-IPD-005,Dose skew coupling,2.7,0.12,0.19,0.11,3.3,86.0,0.79,0.31,1,"Coherence weakening"
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EUV-IPD-006,Vibration-like wobble,3.1,0.14,0.22,0.12,3.9,85.1,0.72,0.42,1,"Predictable drift"
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EUV-IPD-007,Metrology mismatch,3.5,0.16,0.26,0.14,4.6,84.3,0.65,0.54,1,"Strong drift"
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EUV-IPD-008,Control loop lag,3.9,0.18,0.30,0.16,5.3,83.6,0.58,0.66,1,"Near instability"
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EUV-IPD-009,Severe asymmetry,4.4,0.21,0.34,0.19,6.1,82.4,0.49,0.78,1,"Pre-failure"
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EUV-IPD-010,Loss of CD control,4.9,0.24,0.39,0.22,7.2,81.2,0.38,0.90,1,"Critical drift"
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