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Datasets:
ClarusC64
/
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
projection-optics
overlay
drift-detection
License:
mit
Dataset card
Data Studio
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xet
Community
f0c1a17
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
/
README.md
ClarusC64
initial commit
b20cd24
verified
6 months ago
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---
license:
mit
---
