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Datasets:
ClarusC64
/
euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
like
0
Tasks:
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
projection-optics
thermal
deformation
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
Commit History
Update README.md
68832f6
verified
ClarusC64
commited on
Feb 10
Create scorer.py
7837ed6
verified
ClarusC64
commited on
Feb 10
Create data/test.csv
aabf809
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
17096a2
verified
ClarusC64
commited on
Feb 10
initial commit
8bac862
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 