| id,case_title,m1_absorbed_power_w,m2_absorbed_power_w,m3_absorbed_power_w,m4_absorbed_power_w,coolant_flow_lpm,chamber_temp_c,scan_duty_cycle,thermal_mode1_nm,thermal_mode2_nm,thermal_mode3_nm,coherence_score,notes |
| EUV-POA-001,Nominal low load,180,165,150,140,42,21.0,0.35,0.8,0.5,0.3,0.95,"Tight coupling" |
| EUV-POA-002,Nominal mid load,220,205,190,175,42,21.2,0.45,1.2,0.8,0.5,0.93,"Stable manifold" |
| EUV-POA-003,High load stable cooling,260,245,225,205,44,21.4,0.55,1.8,1.2,0.8,0.91,"Cooling holds" |
| EUV-POA-004,High load warmer chamber,265,250,230,210,44,22.0,0.55,2.1,1.4,0.9,0.88,"Temp bias" |
| EUV-POA-005,Coolant slightly low,270,255,235,215,40,22.1,0.60,2.6,1.8,1.2,0.84,"Flow reduced" |
| EUV-POA-006,Local heating signature,275,260,240,220,40,22.3,0.62,3.0,2.2,1.5,0.79,"Mode coupling loosens" |
| EUV-POA-007,Duty cycle stress,285,270,250,230,40,22.5,0.70,3.7,2.8,1.9,0.72,"Thermal modes grow" |
| EUV-POA-008,Near nonlinear regime,295,280,260,240,38,22.7,0.75,4.6,3.6,2.5,0.64,"Nonlinear onset" |
| EUV-POA-009,Clamp sensitivity zone,305,290,270,250,38,22.9,0.78,5.4,4.3,3.1,0.55,"Predictability drops" |
| EUV-POA-010,Pre drift baseline edge,315,300,280,260,36,23.1,0.82,6.3,5.1,3.8,0.46,"Baseline near failure" |
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