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Datasets:
ClarusC64
/
euv-laser-instability-horizon-and-cd-risk-routing-v0.1
like
0
Tasks:
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
semiconductor
lithography
predictive-maintenance
source-stability
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-laser-instability-horizon-and-cd-risk-routing-v0.1
Commit History
Update README.md
21935ee
verified
ClarusC64
commited on
Feb 10
Create scorer.py
682b53e
verified
ClarusC64
commited on
Feb 10
Create data/test.csv
2ab7faf
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
9fbe6f3
verified
ClarusC64
commited on
Feb 10
initial commit
c844bbb
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 