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Datasets:
ClarusC64
/
euv-laser-instability-horizon-and-cd-risk-routing-v0.1
like
0
Tasks:
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
semiconductor
lithography
predictive-maintenance
source-stability
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
2ab7faf
euv-laser-instability-horizon-and-cd-risk-routing-v0.1
Commit History
Create data/test.csv
2ab7faf
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
9fbe6f3
verified
ClarusC64
commited on
Feb 10
initial commit
c844bbb
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 