---
language:
  - en
license: mit
pretty_name: EUV Projection Optics Deformation–Overlay Coherence Drift Detection v0.1
dataset_name: euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
tags:
  - clarusc64
  - euv
  - lithography
  - projection-optics
  - overlay
  - drift-detection
task_categories:
  - tabular-classification
  - tabular-regression
size_categories:
  - 1K<n<10K
configs:
  - config_name: default
    data_files:
      - split: train
        path: data/train.csv
      - split: test
        path: data/test.csv
---

## What this dataset tests

When thermo-mechanical deformation stops predicting overlay error cleanly.

This is the second layer of projection optics thermo-mechanical decoupling:

deformation modes  
overlay error growth  
cause-axis attribution

## Task

Given deformation modes and overlay state, predict:

overlay_drift_score (0..1)  
drift_flag (0/1)  
dominant_cause_axis

Output format:
float,int,string

Example:
0.58,1,cooling

## Fields

Inputs
- thermal_mode1_nm
- thermal_mode2_nm
- thermal_mode3_nm
- overlay_error_nm
- overlay_within_spec
- baseline_coherence

Targets
- overlay_drift_score
- drift_flag
- dominant_cause_axis

## Cause axis meanings

thermal: global heating trend  
cooling: flow imbalance or coolant loss  
mount: clamp or support drift  
metrology: measurement/model mismatch  
contamination: absorbed power rise from fouling  
none: stable regime

## Evaluation

Absolute error for drift score  
Bonus for correct drift flag  
Bonus for correct cause axis

## Version

v0.1