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Datasets:
ClarusC64
/
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
projection-optics
overlay
drift-detection
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
7b09ff2
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
Commit History
Update README.md
7b09ff2
verified
ClarusC64
commited on
Feb 10
Create scorer.py
f0c1a17
verified
ClarusC64
commited on
Feb 10
Create data/test.csv
1397329
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
9243394
verified
ClarusC64
commited on
Feb 10
initial commit
b20cd24
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 