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Datasets:
ClarusC64
/
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
projection-optics
overlay
drift-detection
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
1397329
euv-projection-optics-deformation-overlay-coherence-drift-detection-v0.1
Commit History
Create data/test.csv
1397329
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
9243394
verified
ClarusC64
commited on
Feb 10
initial commit
b20cd24
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 