| id,case_title,thermal_mode1_nm,thermal_mode2_nm,thermal_mode3_nm,overlay_error_nm,overlay_within_spec,baseline_coherence,overlay_drift_score,drift_flag,dominant_cause_axis,notes,constraints | |
| EUV-POD-T01,Assess overlay drift,4.0,3.1,2.1,8.4,0,0.70,,,"","Predict overlay_drift_score, drift_flag, dominant_cause_axis",Under 220 words | |