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9243394 | 1 2 3 4 5 6 7 8 9 10 11 12 | id,case_title,thermal_mode1_nm,thermal_mode2_nm,thermal_mode3_nm,overlay_error_nm,overlay_within_spec,baseline_coherence,overlay_drift_score,drift_flag,dominant_cause_axis,notes
EUV-POD-001,Nominal overlay,0.9,0.6,0.4,1.4,1,0.95,0.04,0,none,"Stable overlay"
EUV-POD-002,Minor overlay creep,1.4,0.9,0.6,2.1,1,0.92,0.09,0,thermal,"Small drift"
EUV-POD-003,Moderate deformation,2.0,1.3,0.9,3.2,1,0.89,0.16,0,thermal,"Monitor"
EUV-POD-004,Overlay coupling noise,2.5,1.8,1.2,4.6,1,0.84,0.25,1,metrology,"Drift onset"
EUV-POD-005,Cooling imbalance,3.1,2.2,1.5,6.1,1,0.79,0.34,1,cooling,"Coupling weakening"
EUV-POD-006,Mount sensitivity,3.7,2.8,1.9,7.9,0,0.73,0.46,1,mount,"Spec breached"
EUV-POD-007,Contamination heat load,4.4,3.5,2.4,9.6,0,0.66,0.58,1,contamination,"Nonlinear drift"
EUV-POD-008,Severe overlay drift,5.2,4.2,3.0,12.5,0,0.58,0.71,1,cooling,"Escalating"
EUV-POD-009,Metrology mismatch severe,5.9,4.8,3.5,14.8,0,0.51,0.83,1,metrology,"Overlay model failing"
EUV-POD-010,Pre-failure overlay,6.6,5.4,4.0,17.2,0,0.44,0.92,1,thermal,"Failure imminent"
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