---
language:
  - en
license: mit
pretty_name: EUV Projection Optics Absorption–Deformation Coherence Baseline Mapping v0.1
dataset_name: euv-projection-optics-absorption-deformation-coherence-baseline-mapping-v0.1
tags:
  - clarusc64
  - euv
  - lithography
  - projection-optics
  - thermal
  - deformation
task_categories:
  - tabular-regression
size_categories:
  - 1K<n<10K
configs:
  - config_name: default
    data_files:
      - split: train
        path: data/train.csv
      - split: test
        path: data/test.csv
---

## What this dataset tests

Baseline coherence between:

absorbed EUV power per projection mirror  
cooling and thermal environment  
resulting thermo-mechanical deformation modes

This is the first layer needed to forecast overlay drift.

## Task

Given power and environment inputs, predict:

coherence_score

A scalar 0..1 describing how predictable deformation is from absorbed power and thermal conditions.

## Inputs

- m1_absorbed_power_w
- m2_absorbed_power_w
- m3_absorbed_power_w
- m4_absorbed_power_w
- coolant_flow_lpm
- chamber_temp_c
- scan_duty_cycle

Context outputs

- thermal_mode1_nm
- thermal_mode2_nm
- thermal_mode3_nm

Target

- coherence_score

## Output format

Return a single float.

Example:
0.84

## Evaluation

Absolute error scoring when ground truth exists.  
Format validity scored when ground truth is absent.

## Version

v0.1