id,case_title,m1_absorbed_power_w,m2_absorbed_power_w,m3_absorbed_power_w,m4_absorbed_power_w,coolant_flow_lpm,chamber_temp_c,scan_duty_cycle,thermal_mode1_nm,thermal_mode2_nm,thermal_mode3_nm,coherence_score,notes,constraints
EUV-POA-T01,Estimate baseline coherence,285,268,248,228,40,22.4,0.68,3.5,2.6,1.8,,"Model outputs coherence_score 0..1",Under 200 words