---
language:
  - en
license: mit
pretty_name: EUV Laser Instability Horizon & CD Risk Routing v0.1
dataset_name: euv-laser-instability-horizon-and-cd-risk-routing-v0.1
tags:
  - clarusc64
  - euv
  - semiconductor
  - lithography
  - predictive-maintenance
  - source-stability
task_categories:
  - tabular-regression
size_categories:
  - 1K<n<10K
configs:
  - config_name: default
    data_files:
      - split: train
        path: data/train.csv
      - split: test
        path: data/test.csv
---

## What this dataset tests

Predict the time horizon to EUV source instability and route corrective action before CD uniformity collapses.

The model must detect when pulse-shape ↔ EUV energy coupling has degraded enough to threaten wafer uniformity.

## Task

Given laser and EUV output parameters, output:

- predicted horizon (cycles to instability)
- cd_uniformity_risk_score (0–1)
- intervention_action

## Why fabs care

CD uniformity failures cost yield long before a source “fails.”
This dataset trains early intervention routing to preserve throughput.

## Inputs

pulse_rise_time_ns  
pulse_width_ns  
peak_power_mw  
pre_pulse_energy_mj  
timing_jitter_ns  
euv_energy_mean_mj  
euv_energy_variance  

## Outputs

event_horizon_cycles  
cd_uniformity_risk_score  
intervention_action  

## Output format example

horizon: 1500  
risk: 0.72  
action: power_derate  

## Evaluation

Scoring checks:

- valid horizon prediction  
- valid risk range  
- correct intervention class  

## Version

v0.1