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Datasets:
ClarusC64
/
euv-illumination-pupil-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
optics
drift-detection
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-illumination-pupil-coherence-drift-detection-v0.1
/
README.md
Commit History
Update README.md
74071ca
verified
ClarusC64
commited on
Feb 10
initial commit
ab1d246
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on 