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Datasets:
ClarusC64
/
euv-illumination-pupil-coherence-drift-detection-v0.1
like
0
Tasks:
Tabular Classification
Tabular Regression
Languages:
English
Size:
1K<n<10K
Tags:
clarusc64
euv
lithography
optics
drift-detection
License:
mit
Dataset card
Data Studio
Files
Files and versions
xet
Community
main
euv-illumination-pupil-coherence-drift-detection-v0.1
Commit History
Update README.md
74071ca
verified
ClarusC64
commited on
Feb 10
Create scorer.py
8d43c6b
verified
ClarusC64
commited on
Feb 10
Create data/test.csv
fc60cc2
verified
ClarusC64
commited on
Feb 10
Create data/train.csv
2ac51df
verified
ClarusC64
commited on
Feb 10
initial commit
ab1d246
verified
ClarusC64
commited on
Feb 10
ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on ClarusC64 commited on 