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- ---
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- license: mit
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- ---
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
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+ ---
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+ language:
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+ - en
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+ license: mit
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+ pretty_name: EUV Illumination Pupil Coherence Drift Detection v0.1
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+ dataset_name: euv-illumination-pupil-coherence-drift-detection-v0.1
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+ tags:
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+ - clarusc64
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+ - euv
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+ - lithography
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+ - optics
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+ - drift-detection
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+ task_categories:
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+ - tabular-classification
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+ - tabular-regression
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+ size_categories:
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+ - 1K<n<10K
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+ configs:
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+ - config_name: default
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+ data_files:
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+ - split: train
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+ path: data/train.csv
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+ - split: test
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+ path: data/test.csv
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+ ---
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+
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+ ## Purpose
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+
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+ Detect when illumination-pupil coupling begins to drift toward loss of critical dimension control.
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+
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+ This dataset maps coherence decay between:
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+
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+ pupil geometry
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+ dose distribution
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+ printed wafer metrics
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+
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+ The goal is to identify drift before feature collapse.
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+
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+ ## Task
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+
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+ Input system metrics.
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+
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+ Predict:
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+
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+ drift_score
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+ drift_flag
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+
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+ Format:
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+ float,int
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+
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+ Example:
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+ 0.42,1
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+
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+ ## Why this matters
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+
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+ Lithography systems rarely fail instantly.
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+ They drift.
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+
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+ Early detection prevents yield loss and tool downtime.
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+
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+ ## Evaluation
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+
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+ Absolute error on drift_score
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+ Classification bonus for drift_flag
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+
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+ Format validity scored when ground truth absent.
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+
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+ ## Version
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+
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+ v0.1